GTI Technologies, Inc. - Semiconductor - Astel

Products

About Us

Spindle Repairs

> > >

Proteus Inspection

Wafer Micro/Macro Inspection System

View the brochure in PDF format

The Proteus inspection, based on the modular Proteus architecture, ensures the possibility to build machines according to customer needs in a flexible and easy way. Proteus Inspection is a dedicated micro and macro inspection station for silicon wafers. This machine is based on a number of integrated components, with mechanics and control system with a central PC based control. All modules include the latest developments of wafer handling, such as integrated laser mapping, optical measurement systems and object based interface software. Proteus Inspection is available in a tabletop version or directly mounted on a vibration free granite workbench, which can be customized according to customer needs. Also available are a software system to collect and process statistics and quality data, and an integrated SPC system to best control process quality and trends.

UPCOMING TRADESHOW

Join GTI at Semicon West, San Francisco, CA
Exhibition: 10-12 July 2012
Click here for more details.

Features:

Wafer size up to 8" depending on version (special 12" version on request)
Table top or complete station versions available from 3 to 9 Axis, Step Motor and DC motor Driven
Computer Control
Laser Mapping
Dimensions: from 700 mm W, 450 mm D, 500 mm H (plus computer and monitor, - 6" version) to 1500 mm W, 800 mm D, 500 mm h (including pc and monitor and microscope space)
Facilities: 220 Vac, 0,5 Kw, Nitrogen pressure 6 Bar, Standard line vacuum

Advantages:

Can be customized to individual company
Integrated laser mapping
Optional software to collect and process quality data
Computer interface is simple, requiring no special operational training

Contact GTI for more information