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Proteus Macro Inspection
Proteus Macro Inspection
Wafer Macro Inspection System
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Proteus Macro Inspection is a small, computer controlled tabletop machine used for wafer macro inspection. It features wafer tilt and rotation to optimize collimated light inspection and is mounted on a vibration free granite basement. Proteus Macro is available in different versions, with single or double cassette (for automated rejected wafer storage), for wafers up to 8" (standard) or 12" (on request). The machine also offers the possibility to edit and recall recipes, and each one includes inspection strategies (all wafers, fixed wafers and random access for statistical inspection) and handling parameters.
UPCOMING TRADESHOW
Join GTI at Semicon West, San Francisco, CA
Exhibition: 10-12 July 2012
Click here for more details.
Advantages:
Use and programming is fast, easy and user friendly
Small size with wafer tilt and rotation
Various versions, with different cassette options
Contact GTI for more information
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